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Fabrication of a Polymer Micro Needle Array by Mask-Dragging X-Ray Lithography and Alignment X-Ray Lithography

Li, Yi-Gui, Yang, Chun-Sheng, Liu, Jing-Quan, Sugiyama, Susumu

Journal:

Chinese Physics Letters

Année:

2011

Langue:

english

Fichier:

PDF, 1.07 MB

english, 2011

A cross-junction channel valveless-micropump with PZT actuation

Van Thanh Dau, Thien Xuan Dinh, Tanaka Katsuhiko, Sugiyama Susumu

Journal:

Microsystem Technologies

Année:

2009

Langue:

english

Fichier:

PDF, 454 KB

english, 2009

Thinking about the 2020 Tokyo Olympic Games: Globalization, Urban and Regional Development, and Security; 東京オリンピックに向けて考える―グローバル化，都市・地域開発，セキュリティ―;

Miyo, ARAMATA, Naoki, OSHIRO, Susumu, YAMAGUCHI, Ryo, KOIZUMI, Kazuaki, SUGIYAMA

Journal:

E-journal GEO

Année:

2018

Fichier:

PDF, 3.37 MB

2018

Mechanical property measurements of thin films using load-deflection of composite rectangular membranes

Osamu Tabata, Ken Kawahata, Susumu Sugiyama, Isemi Igarashi

Journal:

Sensors and Actuators

Année:

1989

Langue:

english

Fichier:

PDF, 510 KB

english, 1989

Anisotropic etching of silicon in TMAH solutions

Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi, Keiichi Shimaoka, Susumu Sugiyama

Journal:

Sensors and Actuators A: Physical

Année:

1992

Langue:

english

Fichier:

PDF, 415 KB

english, 1992

Ultrahigh-sensitive WO3 nanosensor with interdigitated Au nano-electrode for NO2 detection

Jun Tamaki, Takeshi Hashishin, Yudai Uno, Dzung Viet Dao, Susumu Sugiyama

Journal:

Sensors and Actuators B: Chemical

Année:

2008

Langue:

english

Fichier:

PDF, 862 KB

english, 2008

First-Principles Simulation on Piezoresistive Properties in Doped Silicon Nanosheets

Koichi Nakamura, Toshiyuki Toriyama, Susumu Sugiyama

Journal:

IEEJ Transactions on Electrical and Electronic Engineering

Année:

2010

Langue:

english

Fichier:

PDF, 409 KB

english, 2010

Strain Sensitive Effect in a Triangular Lattice Photonic Crystal Hole-Modified Nanocavity

Tung, Bui Thanh, Nguyen, Hoang Minh, Dao, Dzung Viet, Rogge, Sven, Salemink, Huub W. M., Sugiyama, Susumu

Journal:

IEEE Sensors Journal

Année:

2011

Langue:

english

Fichier:

PDF, 2.09 MB

english, 2011

Synthesis of bicyclic enediynes that possess a photosensitive triggering device and exhibit strong DNA cleaving activity

Tanaka, Hiroshi, Tanaka, Yoshikazu, Minoshima, Masafumi, Yamaguchi, Sho, Fuse, Shinichiro, Doi, Takayuki, Kawauchi, Susumu, Sugiyama, Hiroshi, Takahashi, Takashi

Journal:

Chemical Communications

Année:

2010

Langue:

english

Fichier:

PDF, 991 KB

english, 2010

[IEEE 2009 IEEE Sensors - Christchurch, New Zealand (2009.10.25-2009.10.28)] 2009 IEEE Sensors - Microfluidic valveless pump actuated by electromagnetic force

Dau, Van Thanh, Dinh, Thien Xuan, Nguyen, Quang Dich, Amarasinghe, R., Tanaka, Katsuhiko, Sugiyama, Susumu

Année:

2009

Langue:

english

Fichier:

PDF, 539 KB

english, 2009

Design and fabrication of a miniaturized six-degree-of-freedom piezoresistive accelerometer

Amarasinghe, Ranjith, Dao, Dzung Viet, Toriyama, Toshiyuki, Sugiyama, Susumu

Journal:

Journal of Micromechanics and Microengineering

Année:

2005

Langue:

english

Fichier:

PDF, 531 KB

english, 2005

Does social interaction influence the effect of cognitive intervention program? A randomized controlled trial using Go Game

Iizuka, Ai, Suzuki, Hiroyuki, Ogawa, Susumu, Kobayashi-Cuya, Kimi Estela, Kobayashi, Momoko, Inagaki, Hiroki, Sugiyama, Mika, Awata, Shuichi, Takebayashi, Toru, Fujiwara, Yoshinori

Journal:

International Journal of Geriatric Psychiatry

Année:

2018

Langue:

english

Fichier:

PDF, 697 KB

english, 2018

What is the Object of Physical Education in the Higher Education?

SUGIYAMA, Susumu

Journal:

Journal of the Philosophy of Sport and Physical Education

Année:

2009

Fichier:

PDF, 120 KB

2009

Integrated CNTs thin film for MEMS mechanical sensors

Van Thanh Dau, Takeo Yamada, Dzung Viet Dao, Bui Thanh Tung, Kenji Hata, Susumu Sugiyama

Journal:

Microelectronics Journal

Année:

2010

Langue:

english

Fichier:

PDF, 619 KB

english, 2010

Tactile image detection using a 1k-element silicon pressure sensor array

Susumu Sugiyama, Ken Kawahata, Masakazu Yoneda, Isemi Igarashi

Journal:

Sensors and Actuators A: Physical

Année:

1989

Langue:

english

Fichier:

PDF, 834 KB

english, 1989

Fatigue behavior of die casting aluminum alloys in air and vacuum

Akira Ueno, Susumu Miyakawa, Koji Yamada, Tomoyuki Sugiyama

Journal:

Procedia Engineering

Année:

2010

Langue:

english

Fichier:

PDF, 763 KB

english, 2010

Development of miniaturized 6-axis accelerometer utilizing piezoresistive sensing elements

Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama, Susumu Sugiyama

Journal:

Sensors and Actuators A: Physical

Année:

2007

Langue:

english

Fichier:

PDF, 2.06 MB

english, 2007

Experimental study on mechanical power generation from MEMS internal combustion engine

Yu Suzuki, Yasuhiro Okada, Jyunji Ogawa, Susumu Sugiyama, Toshiyuki Toriyama

Journal:

Sensors and Actuators A: Physical

Année:

2008

Langue:

english

Fichier:

PDF, 2.06 MB

english, 2008

Fluidic device with pumping and sensing functions for precise flow control

Thien Xuan Dinh, Van Thanh Dau, Susumu Sugiyama, Phuc Hong Pham

Journal:

Sensors and Actuators B: Chemical

Année:

2010

Langue:

english

Fichier:

PDF, 838 KB

english, 2010

Direct writing for three-dimensional microfabrication using synchrotron radiation etching

Takanori Katoh, Nobuyoshi Nishi, Masafumi Fukagawa, Hiroshi Ueno, Susumu Sugiyama

Journal:

Sensors and Actuators A: Physical

Année:

2001

Langue:

english

Fichier:

PDF, 439 KB

english, 2001

Fabrication of alloy and ceramic microstructures by LIGA–MA–SPS process

Naoki Miyano, Kazunori Tagaya, Kazunori Kawase, Kei Ameyama, Susumu Sugiyama

Journal:

Sensors and Actuators A: Physical

Année:

2003

Langue:

english

Fichier:

PDF, 828 KB

english, 2003

Piezoelectric MEMS generator based on the bulk PZT/silicon wafer bonding technique

Gang Tang, Jing-quan Liu, He-sheng Liu, Yi-gui Li, Chun-sheng Yang, Dan-nong He, Viet DzungDao, Katsuhiko Tanaka, Susumu Sugiyama

Journal:

physica status solidi (a)

Année:

2011

Langue:

english

Fichier:

PDF, 644 KB

english, 2011

Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask

Yigui Li, Susumu Sugiyama

Journal:

Microsystem Technologies

Année:

2007

Langue:

english

Fichier:

PDF, 431 KB

english, 2007

Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithography

Sommawan Khumpuang, Mitsuhiro Horade, Kazuya Fujioka, Susumu Sugiyama

Journal:

Microsystem Technologies

Année:

2007

Langue:

english

Fichier:

PDF, 571 KB

english, 2007

Mask design compensation for sloped sidewall structures fabricated by X-ray lithography

Mitsuhiro Horade, Sommawan Khumpuang, Kazuya Fujioka, Susumu Sugiyama

Journal:

Microsystem Technologies

Année:

2007

Langue:

english

Fichier:

PDF, 387 KB

english, 2007

Fabrication of high aspect ratio nano gratings using SR lithography

Fumiki Kato, Shinya Fujinawa, Yigui Li, Susumu Sugiyama

Journal:

Microsystem Technologies

Année:

2007

Langue:

english

Fichier:

PDF, 483 KB

english, 2007

3-D PTFE microstructure fabricated using synchrotoron radiation etching

Mitsuhiro Horade, Sommawan Khumpuang, Susumu Sugiyama

Journal:

Microsystem Technologies

Année:

2008

Langue:

english

Fichier:

PDF, 365 KB

english, 2008

A micro electromagnetic low level vibration energy harvester based on MEMS technology

Peihong Wang, Katsuhiko Tanaka, Susumu Sugiyama, Xuhan Dai, Xiaolin Zhao, Jingquan Liu

Journal:

Microsystem Technologies

Année:

2009

Langue:

english

Fichier:

PDF, 730 KB

english, 2009

Fabrication of optically smooth, through-wafer silicon molds for PDMS total internal reflection-based devices

Nam Cao Hoai Le, Dzung Viet Dao, Ryuji Yokokawa, John C. Wells, Susumu Sugiyama

Journal:

Microsystem Technologies

Année:

2009

Langue:

english

Fichier:

PDF, 522 KB

english, 2009

Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes

Yuichiro Ezoe, Ikuyuki Mitsuishi, Utako Takagi, Masaki Koshiishi, Kazuhisa Mitsuda, Noriko Y. Yamasaki, Takaya Ohashi, Fumiki Kato, Susumu Sugiyama, Raul E. Riveros, Hitomi Yamaguchi, Shinya Fujihira,

Journal:

Microsystem Technologies

Année:

2010

Langue:

english

Fichier:

PDF, 828 KB

english, 2010

Study on fabrication of 3-D microstructures by synchrotron radiation based on pixels exposed lithography

Mitsuhiro Horade, Susumu Sugiyama

Journal:

Microsystem Technologies

Année:

2010

Langue:

english

Fichier:

PDF, 845 KB

english, 2010

Measurement of mechanical and thermal properties of co-sputtered WSi thin film for MEMS applications

Bui Thanh Tung, Dzung Viet Dao, Toshiyuki Toriyama, Susumu Sugiyama

Journal:

Microsystem Technologies

Année:

2010

Langue:

english

Fichier:

PDF, 530 KB

english, 2010

Transcriptome analysis device based on liquid phase detection by fluorescently labeled nucleic acid probes

Ryuji Yokokawa, Soichiro Tamaoki, Takashi Sakamoto, Akira Murakami, Susumu Sugiyama

Journal:

Biomedical Microdevices

Année:

2007

Langue:

english

Fichier:

PDF, 291 KB

english, 2007

Designing of a Si-MEMS device with an integrated skeletal muscle cell-based bio-actuator

Hideaki Fujita, Van Thanh Dau, Kazunori Shimizu, Ranko Hatsuda, Susumu Sugiyama, Eiji Nagamori

Journal:

Biomedical Microdevices

Année:

2011

Langue:

english

Fichier:

PDF, 454 KB

english, 2011

Integrated piezoresistive pressure sensor with both voltage and frequency output

Susumu Sugiyama, Mitsuharu Takigawa, Isemi Igarashi

Journal:

Sensors and Actuators

Année:

1983

Langue:

english

Fichier:

PDF, 1.19 MB

english, 1983

Digital compensated capacitive pressure sensor using CMOS technology for low-pressure measurements

Tomio Nagata, Hiroaki Terabe, Sirou Kuwahara, Shizuki Sakurai, Osamu Tabata, Susumu Sugiyama, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Année:

1992

Langue:

english

Fichier:

PDF, 266 KB

english, 1992

Comparison of aspartic acid racemization between mammoth and human dentinal tissues

Szilvia Arany, Susumu Ohtani, Toshiharu Yamamoto, Toshihiro Sugiyama

Journal:

Archives of Oral Biology

Année:

2007

Langue:

english

Fichier:

PDF, 460 KB

english, 2007

Fabrication of high aspect ratio subwavelength gratings based on X-ray lithography and electron beam lithography

Chenchen Luo, Yigui Li, Sugiyama Susumu

Journal:

Optics & Laser Technology

Année:

2012

Langue:

english

Fichier:

PDF, 899 KB

english, 2012

Development of an alternating magnetic-field-assisted finishing process for microelectromechanical systems micropore x-ray optics

Riveros, Raul E., Yamaguchi, Hitomi, Mitsuishi, Ikuyuki, Takagi, Utako, Ezoe, Yuichiro, Kato, Fumiki, Sugiyama, Susumu, Yamasaki, Noriko, Mitsuda, Kazuhisa

Journal:

Applied Optics

Année:

2010

Langue:

english

Fichier:

PDF, 1.65 MB

english, 2010

Influence of developer temperature on the shape of structures fabricated by deep X-ray lithography

Mitsuhiro Horade, Susumu Sugiyama

Journal:

Microsystem Technologies

Année:

2013

Langue:

english

Fichier:

PDF, 553 KB

english, 2013

Fabrication of 3-D PTFE microstructures utilising change of etching rate with respect to exposure time

Mitsuhiro Horade, Susumu Sugiyama

Journal:

Microsystem Technologies

Année:

2013

Langue:

english

Fichier:

PDF, 529 KB

english, 2013

Watt-class high-power, high-beam-quality photonic-crystal lasers

Hirose, Kazuyoshi, Liang, Yong, Kurosaka, Yoshitaka, Watanabe, Akiyoshi, Sugiyama, Takahiro, Noda, Susumu

Journal:

Nature Photonics

Année:

2014

Langue:

english

Fichier:

PDF, 2.44 MB

english, 2014

Multimodule Micro Transportation System Based on Electrostatic Comb-Drive Actuator and Ratchet Mechanism

Dao, Dzung Viet, Pham, Phuc Hong, Sugiyama, Susumu

Journal:

Journal of Microelectromechanical Systems

Année:

2011

Langue:

english

Fichier:

PDF, 1.48 MB

english, 2011

[IEEE 2012 2nd Workshop on Design, Control and Software Implementation for Distributed MEMS (dMEMS) - Besancon, France (2012.04.2-2012.04.3)] 2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS - Development of Multi-functional Sensor Module for Energy Saving Air Conditioner System

Ueki, Shinji, Imamoto, Hiroshi, Ando, Koji, Fujimori, Tsukasa, Sugiyama, Susumu, Itoh, Toshihiro, Maeda, Ryutaro

Année:

2012

Langue:

english

Fichier:

PDF, 1.30 MB

english, 2012

[IEEE 2006 IEEE International Symposium on MicroNanoMechanical and Human Science - Nagoya University, Nagoya, Japan (2006.11.5-2006.11.8)] 2006 IEEE International Symposium on MicroNanoMechanical and Human Science - Fabrication and Characterization of 4-DOF Soft-Contact Tactile Sensor and Application to Robot Fingers

Dao, Dzung, Sugiyama, Susumu

Année:

2006

Langue:

english

Fichier:

PDF, 5.29 MB

english, 2006

Development of a Dual-Axis Convective Gyroscope With Low Thermal-Induced Stress Sensing Element

Dao, Dzung Viet, Dau, Van Thanh, Shiozawa, Tatsuo, Sugiyama, Susumu

Journal:

Journal of Microelectromechanical Systems

Année:

2007

Langue:

english

Fichier:

PDF, 887 KB

english, 2007

[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - A fully functional micro transportation system with strider-like movement of micro containers

Dzung Viet Dao,, Phuc Hong Pham,, Susumu Sugiyama,

Année:

2008

Langue:

english

Fichier:

PDF, 4.69 MB

english, 2008

Control of internal stress and Young’s modulus of Si3N4 and polycrystalline silicon thin films using the ion implantation technique

Tabata, Osamu, Sugiyama, Susumu, Takigawa, Mitsuharu

Journal:

Applied Physics Letters

Année:

1990

Langue:

english

Fichier:

PDF, 555 KB

english, 1990

Successive hydrogen-elimination reactions with low activation energies in the a -Si:H formation process: An ab initio molecular-orbital study

Sato, Kota, Sugiyama, Yoko, Uchiyama, Akihiko, Iwabuchi, Susumu, Hirano, Tsuneo, Koinuma, Hideomi

Journal:

Physical Review B

Année:

1992

Langue:

english

Fichier:

PDF, 143 KB

english, 1992

[IEEE 2008 International Symposium on Micro-NanoMechatronics and Human Science (MHS) - Nagoya, Japan (2008.11.6-2008.11.9)] 2008 International Symposium on Micro-NanoMechatronics and Human Science - Highly-sensitive Dual-fluorescence Detection and Imaging with Integrated Dual-color Total Internal Reflection (TIR)-based Chip

Le, Nam Cao Hoai, Dao, Dzung Viet, Yokokawa, Ryuji, Wells, John, Sugiyama, Susumu

Année:

2008

Langue:

english

Fichier:

PDF, 6.84 MB

english, 2008